1

ZrO2thin films on Si substrate

Year:
2010
Language:
english
File:
PDF, 514 KB
english, 2010
2

Formation of Zr-oxynitride thin films on 4H-SiC substrate

Year:
2012
Language:
english
File:
PDF, 1.03 MB
english, 2012
11

Microstructural and optical properties of ZrON/Si thin films

Year:
2013
Language:
english
File:
PDF, 737 KB
english, 2013
12

Comparison of oxidized/nitrided Zr thin films on Si and SiC substrates

Year:
2013
Language:
english
File:
PDF, 539 KB
english, 2013